CMOS-comp Silicon

نویسندگان

  • A. Masood
  • M. Pantouvaki
  • G. Lepage
  • P. Verheyen
  • D. Van Thou Bogaerts
چکیده

We present a Tungsten thermo-opti using standard CMOS back-end fabrication p efficiency of 35.2mW/FSR was achieved on rin 10%-90% heating time of 2.8μs.

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تاریخ انتشار 2012